Assignee
AXUS TECH LLC
US9 patents
Top patents by PatentIndex Score
US12145236B2Nov 19, 2024
Containment and exhaust system for substrate polishing components
AXUS TECH LLC0 citations58
US12377520B2Aug 5, 2025
Method and apparatus for insitu adjustment of wafer slip detection during work piece polishing
AXUS TECH LLC0 citations56
US11904431B2Feb 20, 2024
Method and apparatus for insitu adjustment of wafer slip detection during work piece polishing
AXUS TECH LLC1 citations56
US11685012B2Jun 27, 2023
Planarized membrane and methods for substrate processing systems
AXUS TECH LLC0 citations56
US11376705B2Jul 5, 2022
Chemical mechanical planarization carrier system
AXUS TECH LLC0 citations54
US12198935B2Jan 14, 2025
Atmospheric plasma in wafer processing system optimization
AXUS TECH LLC0 citations49
US12217979B2Feb 4, 2025
Temperature controlled substrate carrier and polishing components
AXUS TECH LLC0 citations48
US10315286B2Jun 11, 2019
Chemical mechanical planarization carrier system
AXUS TECH LLC0 citations44
US12023778B2Jul 2, 2024
Substrate carrier head and processing system
AXUS TECH LLC0 citations38