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BABBS DANIEL

US3 patents

Top patents by PatentIndex Score

US9105673B2Aug 11, 2015

Side opening unified pod

BABBS DANIEL41 citations96

US8297319B2Oct 30, 2012

Carrier gas system and coupling substrate carrier to a loadport

BABBS DANIEL9 citations83

US8827618B2Sep 9, 2014

Transport system

BABBS DANIEL7 citations82