Assignee
BALSEANU MIHAELA
US·9 granted patents·3 pending applications·1,010 citations·filing 2006–2012
Top patents by PatentIndex Score
12 records- 0198US8138104B2Method to increase silicon nitride tensile stress using nitrogen plasma in-situ treatment and ex-situ UV cureBALSEANU MIHAELA·Filed 2007·Granted Mar 20, 2012·479 cites·18 claims
- 0298US8129290B2Method to increase tensile stress of silicon nitride films using a post PECVD deposition UV cureBALSEANU MIHAELA·Filed 2006·Granted Mar 6, 2012·492 cites·16 claims
- 0392US8148269B2Boron nitride and boron-nitride derived materials deposition methodBALSEANU MIHAELA·Filed 2009·Granted Apr 3, 2012·22 cites·5 claims
- 0484US8753989B2Method to increase tensile stress of silicon nitride films using a post PECVD deposition UV cureBALSEANU MIHAELA·Filed 2012·Granted Jun 17, 2014·5 cites·14 claims
- 0578US8492880B2Multilayered low k cap with conformal gap fill and UV stable compressive stress propertiesBALSEANU MIHAELA·Filed 2011·Granted Jul 23, 2013·3 cites·13 claims
- 0673US8563090B2Boron film interface engineeringBALSEANU MIHAELA·Filed 2009·Granted Oct 22, 2013·5 cites·11 claims
- 0773US8536069B2Multilayered low k cap with conformal gap fill and UV stable compressive stress propertiesBALSEANU MIHAELA·Filed 2012·Granted Sep 17, 2013·2 cites·20 claims
- 0871US8252653B2Method of forming a non-volatile memory having a silicon nitride charge trap layerBALSEANU MIHAELA·Filed 2008·Granted Aug 28, 2012·2 cites·23 claims
- 0958US8501568B2Method of forming flash memory with ultraviolet treatmentBALSEANU MIHAELA·Filed 2008·Granted Aug 6, 2013·0 cites·20 claims
- 1048US2012196450A1Method to increase silicon nitride tensile stress using nitrogen plasma in-situ treatment and ex-situ uv cureBALSEANU MIHAELA·Filed 2012·Application pending·0 cites
- 1141US2013333923A1MODULATED COMPOSITIONAL AND STRESS CONTROLLED MULTILAYER ULTRATHIN CONFORMAL SiNx DIELECTRICS USED IN NANO DEVICE FABRICATIONBALSEANU MIHAELA·Filed 2012·Application pending·0 cites
- 1239US2013189841A1Engineering dielectric films for cmp stopBALSEANU MIHAELA·Filed 2012·Application pending·0 cites
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