Assignee
BALUJA SANJEEV
US·2 granted patents·1 pending application·492 citations·filing 2011–2012
Top patents by PatentIndex Score
3 records- 0198US8911553B2Quartz showerhead for nanocure UV chamberBALUJA SANJEEV·Filed 2011·Granted Dec 16, 2014·479 cites·9 claims
- 0291US8455849B2Method and apparatus for modulating wafer treatment profile in UV chamberBALUJA SANJEEV·Filed 2011·Granted Jun 4, 2013·13 cites·18 claims
- 0350US2013177706A1Method for seasoning uv chamber optical components to avoid degradationBALUJA SANJEEV·Filed 2012·Application pending·0 cites
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