Assignee
BALZERS HOCHVAKUUM
LI·191 granted patents·6,681 citations·filing 1977–2000
Top patents by PatentIndex Score
191 records- 0198US4448653ACathode arrangement for sputtering material from a target in a cathode sputtering unitBALZERS HOCHVAKUUM·Filed 1981·Granted May 15, 1984·167 cites·10 claims
- 0297US6740393B1DLC coating system and process and apparatus for making coating systemBALZERS HOCHVAKUUM·Filed 2000·Granted May 25, 2004·135 cites·17 claims
- 0397US5422139AMethod for a reactive surface treatment of a workpiece and a treatment chamber for practicing such methodBALZERS HOCHVAKUUM·Filed 1993·Granted Jun 6, 1995·643 cites·14 claims
- 0496US4448802AMethod and apparatus for evaporating material under vacuum using both an arc discharge and electron beamBALZERS HOCHVAKUUM·Filed 1982·Granted May 15, 1984·72 cites·5 claims
- 0596US4346123AMethod of depositing hard wear-resistant coatings on substratesBALZERS HOCHVAKUUM·Filed 1980·Granted Aug 24, 1982·98 cites·4 claims
- 0695US5897942ACoated body, method for its manufacturing as well as its useBALZERS HOCHVAKUUM·Filed 1994·Granted Apr 27, 1999·119 cites·42 claims
- 0793US5738825AOptical biosensor matrixBALZERS HOCHVAKUUM·Filed 1994·Granted Apr 14, 1998·399 cites·12 claims
- 0893US4877505AMethod and apparatus for application of coatings on substratesBALZERS HOCHVAKUUM·Filed 1988·Granted Oct 31, 1989·83 cites·20 claims
- 0992US5981899ACapacitively coupled RF-plasma reactorBALZERS HOCHVAKUUM·Filed 1997·Granted Nov 9, 1999·76 cites·29 claims
- 1091US5618575AProcess and apparatus for the production of a metal oxide layerBALZERS HOCHVAKUUM·Filed 1995·Granted Apr 8, 1997·77 cites·35 claims
- 1191US5616373APlasma CVD method for producing a diamond coatingBALZERS HOCHVAKUUM·Filed 1994·Granted Apr 1, 1997·89 cites·24 claims
- 1291US5310607AHard coating; a workpiece coated by such hard coating and a method of coating such workpiece by such hard coatingBALZERS HOCHVAKUUM·Filed 1991·Granted May 10, 1994·80 cites·8 claims
- 1391US4622121AApparatus for coating materials by cathode sputteringBALZERS HOCHVAKUUM·Filed 1985·Granted Nov 11, 1986·94 cites·13 claims
- 1490US4543467AEffusion type evaporator cell for vacuum evaporatorsBALZERS HOCHVAKUUM·Filed 1983·Granted Sep 24, 1985·72 cites·7 claims
- 1590US4197175AMethod and apparatus for evaporating materials in a vacuum coating plantBALZERS HOCHVAKUUM·Filed 1978·Granted Apr 8, 1980·47 cites·23 claims
- 1689US5399253APlasma generating deviceBALZERS HOCHVAKUUM·Filed 1993·Granted Mar 21, 1995·80 cites·10 claims
- 1788US5909995ATransport device for workpieces in a vacuum systemBALZERS HOCHVAKUUM·Filed 1997·Granted Jun 8, 1999·71 cites·12 claims
- 1888US5622606AGas inlet arrangementBALZERS HOCHVAKUUM·Filed 1994·Granted Apr 22, 1997·93 cites·15 claims
- 1988US5292417AMethod for reactive sputter coating at least one articleBALZERS HOCHVAKUUM·Filed 1992·Granted Mar 8, 1994·64 cites·32 claims
- 2088US4990047AVacuum apparatusBALZERS HOCHVAKUUM·Filed 1989·Granted Feb 5, 1991·126 cites·22 claims
- 2188US4983269AMethod for erosion detection of a sputtering target and target arrangementBALZERS HOCHVAKUUM·Filed 1989·Granted Jan 8, 1991·59 cites·17 claims
- 2288US4929321AMethod and apparatus for coating workpiecesBALZERS HOCHVAKUUM·Filed 1989·Granted May 29, 1990·42 cites·21 claims
- 2388US4472962ALow pressure leak detectorBALZERS HOCHVAKUUM·Filed 1981·Granted Sep 25, 1984·57 cites·6 claims
- 2487US5336326AMethod of and apparatus for a direct voltage arc discharge enhanced reactive treatment of objectsBALZERS HOCHVAKUUM·Filed 1991·Granted Aug 9, 1994·59 cites·36 claims
- 2586US5423970AApparatus for reactive sputter coating at least one articleBALZERS HOCHVAKUUM·Filed 1993·Granted Jun 13, 1995·53 cites·19 claims
- 2685US4992153ASputter-CVD process for at least partially coating a workpieceBALZERS HOCHVAKUUM·Filed 1989·Granted Feb 12, 1991·61 cites·16 claims
- 2784US5693238AMethod for improving the rate of a plasma enhanced vacuum treatmentBALZERS HOCHVAKUUM·Filed 1994·Granted Dec 2, 1997·45 cites·31 claims
- 2884US5033538AWorkpiece carrier for a disk-shaped workpiece as well as a vacuum process spaceBALZERS HOCHVAKUUM·Filed 1990·Granted Jul 23, 1991·82 cites·22 claims
- 2984US4889772AComposite material having a slide layer applied by cathode sputteringBALZERS HOCHVAKUUM·Filed 1987·Granted Dec 26, 1989·42 cites·10 claims
- 3083US6395379B1Workpiece with wear-protective coatingBALZERS HOCHVAKUUM·Filed 1997·Granted May 28, 2002·56 cites·11 claims
- 3183US5515986APlasma treatment apparatus and method for operating sameBALZERS HOCHVAKUUM·Filed 1994·Granted May 14, 1996·91 cites·27 claims
- 3283US5343112ACathode arrangementBALZERS HOCHVAKUUM·Filed 1992·Granted Aug 30, 1994·46 cites·17 claims
- 3382US5707748ACoated tool with increased service lifeBALZERS HOCHVAKUUM·Filed 1996·Granted Jan 13, 1998·39 cites·17 claims
- 3482US5675691ADiffraction gratings in optical waveguide components and production method thereofBALZERS HOCHVAKUUM·Filed 1995·Granted Oct 7, 1997·61 cites·32 claims
- 3582US5308950AMethod of removing material from a surface in a vacuum chamberBALZERS HOCHVAKUUM·Filed 1992·Granted May 3, 1994·44 cites·14 claims
- 3682US5211759AMethod for a doublesided coating of optical substratesBALZERS HOCHVAKUUM·Filed 1992·Granted May 18, 1993·63 cites·4 claims
- 3781US5269894AMethod of mounting a target plate to be cooled into a vacuum process chamber, an arrangement of a target plate, a target plate and a vacuum chamberBALZERS HOCHVAKUUM·Filed 1992·Granted Dec 14, 1993·57 cites·9 claims
- 3881US4946747AMachine element and method of makingBALZERS HOCHVAKUUM·Filed 1988·Granted Aug 7, 1990·42 cites·19 claims
- 3980US5447804AHard coating; a workpiece coated by such hard coating and a method of coating such workpiece by such hard coatingBALZERS HOCHVAKUUM·Filed 1994·Granted Sep 5, 1995·38 cites·9 claims
- 4080US4995264AGas pressure gauge and pressure measuring methodBALZERS HOCHVAKUUM·Filed 1989·Granted Feb 26, 1991·50 cites·20 claims
- 4180US4380212AArrangement for uniformly coating surfaces of revolution by vapor deposition in a high vacuumBALZERS HOCHVAKUUM·Filed 1981·Granted Apr 19, 1983·37 cites·17 claims
- 4279US6074691AMethod for monitoring the flow of a gas into a vacuum reactorBALZERS HOCHVAKUUM·Filed 1997·Granted Jun 13, 2000·57 cites·25 claims
- 4379US5180000AWorkpiece carrier with suction slot for a disk-shaped workpieceBALZERS HOCHVAKUUM·Filed 1991·Granted Jan 19, 1993·72 cites·7 claims
- 4479US4919968AMethod and apparatus for vacuum vapor depositionBALZERS HOCHVAKUUM·Filed 1988·Granted Apr 24, 1990·48 cites·8 claims
- 4579US4762756AThermochemical surface treatments of materials in a reactive gas plasmaBALZERS HOCHVAKUUM·Filed 1987·Granted Aug 9, 1988·42 cites·28 claims
- 4679US4362125AQuartz oscillator measuring headBALZERS HOCHVAKUUM·Filed 1981·Granted Dec 7, 1982·31 cites·7 claims
- 4778US6071560ATool with tool body and protective layer systemBALZERS HOCHVAKUUM·Filed 1997·Granted Jun 6, 2000·43 cites·11 claims
- 4878US5490913AMagnetic field enhanced sputtering arrangement with vacuum treatment apparatusBALZERS HOCHVAKUUM·Filed 1994·Granted Feb 13, 1996·31 cites·20 claims
- 4978US5246787ATool or instrument with a wear-resistant hard coating for working or processing organic materialsBALZERS HOCHVAKUUM·Filed 1992·Granted Sep 21, 1993·38 cites·6 claims
- 5078US4449478AArrangement for coating substrates by vacuum depositionBALZERS HOCHVAKUUM·Filed 1982·Granted May 22, 1984·34 cites·2 claims
Showing the top 50 of 191 patent records by PatentIndex Score.
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