Assignee
BALZERS PROZESS SYSTEME GMBH
DE·2 granted patents·20 citations·filing 1997–1997
Top patents by PatentIndex Score
2 records- 0152US5728280AApparatus for coating substrates by cathode sputtering with a hollow targetBALZERS PROZESS SYSTEME GMBH·Filed 1997·Granted Mar 17, 1998·17 cites·5 claims
- 0234US5922182AApparatus for coating substrates especially with magnetizable materialsBALZERS PROZESS SYSTEME GMBH·Filed 1997·Granted Jul 13, 1999·3 cites·9 claims
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