Assignee

BAMBA YOSHIO

JP2 patents

Top patents by PatentIndex Score

US9097686B2Aug 4, 2015

Optical type inspection apparatus, inspection system and the wafer for coordinates management

BAMBA YOSHIO2 citations49

US8625089B2Jan 7, 2014

Foreign matter inspection apparatus and foreign matter inspection method

BAMBA YOSHIO0 citations43