Assignee
BANINE VADIM YEVGENYEVICH
NL·13 granted patents·1 pending application·19 citations·filing 2004–2012
Top patents by PatentIndex Score
14 records- 0186US8416391B2Radiation source, lithographic apparatus and device manufacturing methodBANINE VADIM YEVGENYEVICH·Filed 2008·Granted Apr 9, 2013·8 cites·16 claims
- 0282US8217347B2System and method for detecting at least one contamination species in a lithographic apparatusBANINE VADIM YEVGENYEVICH·Filed 2011·Granted Jul 10, 2012·3 cites·11 claims
- 0371US8405051B2Method for removing a deposition on an uncapped multilayer mirror of a lithographic apparatus, lithographic apparatus and device manufacturing methodBANINE VADIM YEVGENYEVICH·Filed 2009·Granted Mar 26, 2013·2 cites·10 claims
- 0463US9285690B2Mirror, lithographic apparatus and device manufacturing methodBANINE VADIM YEVGENYEVICH·Filed 2009·Granted Mar 15, 2016·1 cites·13 claims
- 0560US8598550B2Ex-situ removal of deposition on an optical elementBANINE VADIM YEVGENYEVICH·Filed 2012·Granted Dec 3, 2013·0 cites·27 claims
- 0657US8094288B2Lithographic apparatus and device manufacturing methodBANINE VADIM YEVGENYEVICH·Filed 2004·Granted Jan 10, 2012·4 cites·35 claims
- 0756US8134136B2Ex-situ removal of deposition on an optical elementBANINE VADIM YEVGENYEVICH·Filed 2010·Granted Mar 13, 2012·0 cites·11 claims
- 0853US9097982B2Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filterBANINE VADIM YEVGENYEVICH·Filed 2009·Granted Aug 4, 2015·0 cites·20 claims
- 0952US8445873B2System and method for detecting at least one contamination species in a lithographic apparatusBANINE VADIM YEVGENYEVICH·Filed 2012·Granted May 21, 2013·0 cites·20 claims
- 1047US9594306B2Lithographic apparatus, spectral purity filter and device manufacturing methodBANINE VADIM YEVGENYEVICH·Filed 2011·Granted Mar 14, 2017·0 cites·17 claims
- 1146US9207548B2Radiation source with a debris mitigation system, lithographic apparatus with a debris mitigation system, method for preventing debris from depositing on collector mirror, and device manufacturing methodBANINE VADIM YEVGENYEVICH·Filed 2009·Granted Dec 8, 2015·1 cites·14 claims
- 1246US8242473B2Radiation sourceBANINE VADIM YEVGENYEVICH·Filed 2010·Granted Aug 14, 2012·0 cites·18 claims
- 1338US9411250B2Radiation system and lithographic apparatusBANINE VADIM YEVGENYEVICH·Filed 2009·Granted Aug 9, 2016·0 cites·41 claims
- 1438US2014002805A1Electrostatic Clamp Apparatus And Lithographic ApparatusBANINE VADIM YEVGENYEVICH·Filed 2012·Application pending·0 cites
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