Assignee
BARTSCH CHRISTIN
DE·2 granted patents·2 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0158US8664115B2Copper interconnect with metal hardmask removalBARTSCH CHRISTIN·Filed 2011·Granted Mar 4, 2014·2 cites·20 claims
- 0245US8338293B2Method of reducing erosion of a metal cap layer during via patterning in semiconductor devicesBARTSCH CHRISTIN·Filed 2011·Granted Dec 25, 2012·0 cites·16 claims
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