Assignee
BAUER MATTHIAS
US5 patents
Top patents by PatentIndex Score
US8809170B2Aug 19, 2014
High throughput cyclical epitaxial deposition and etch process
BAUER MATTHIAS423 citations99
US8278176B2Oct 2, 2012
Selective epitaxial formation of semiconductor films
BAUER MATTHIAS559 citations98
US9312131B2Apr 12, 2016
Selective epitaxial formation of semiconductive films
BAUER MATTHIAS38 citations94
US8728239B2May 20, 2014
Methods and apparatus for a gas panel with constant gas flow
BAUER MATTHIAS16 citations82
US9190515B2Nov 17, 2015
Structure comprises an As-deposited doped single crystalline Si-containing film
BAUER MATTHIAS2 citations63