Assignee

BECKER VOLKER

DE·1 granted patent·0 citations·filing 2008–2008

Technology mixB81C1 H01L1 H10P1

Top patents by PatentIndex Score

1 record

0142US8946090B2Method for etching a layer on a silicon semiconductor substrateBECKER VOLKER·Filed 2008·Granted Feb 3, 2015·0 cites·22 claims

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