Assignee

BEHDJAT MEHRAN

US·2 granted patents·9 citations·filing 2008–2009

Technology mixH10P2 F16K1

Top patents by PatentIndex Score

2 records

0181US8070408B2Load lock chamber for large area substrate processing systemBEHDJAT MEHRAN·Filed 2008·Granted Dec 6, 2011·8 cites·16 claims
0262US8567756B2Slit valve door able to compensate for chamber deflectionBEHDJAT MEHRAN·Filed 2009·Granted Oct 29, 2013·1 cites·6 claims

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