Assignee
BELEN RODOLFO P
US·1 granted patent·2 pending applications·18 citations·filing 2007–2008
Top patents by PatentIndex Score
3 records- 0189US8066895B2Method to control uniformity using tri-zone showerheadBELEN RODOLFO P·Filed 2008·Granted Nov 29, 2011·18 cites·23 claims
- 0242US2009156011A1Method of controlling CD bias and CD microloading by changing the ceiling-to-wafer gap in a plasma reactorBELEN RODOLFO P·Filed 2007·Application pending·0 cites
- 0342US2008149592A1Plasma etch process for controlling line edge roughnessBELEN RODOLFO P·Filed 2007·Application pending·0 cites
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