Assignee
BENJAMIN NEIL
US·5 granted patents·1 pending application·51 citations·filing 2004–2009
Top patents by PatentIndex Score
6 records- 0191US8528498B2Integrated steerability array arrangement for minimizing non-uniformityBENJAMIN NEIL·Filed 2008·Granted Sep 10, 2013·13 cites·19 claims
- 0287US8963052B2Method for controlling spatial temperature distribution across a semiconductor waferBENJAMIN NEIL·Filed 2009·Granted Feb 24, 2015·9 cites·20 claims
- 0386US8755204B2RF isolation for power circuitryBENJAMIN NEIL·Filed 2009·Granted Jun 17, 2014·20 cites·17 claims
- 0469US8536494B2Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece supportBENJAMIN NEIL·Filed 2004·Granted Sep 17, 2013·9 cites·15 claims
- 0552US9105449B2Distributed power arrangements for localizing power deliveryBENJAMIN NEIL·Filed 2008·Granted Aug 11, 2015·0 cites·23 claims
- 0652US2009000738A1Arrays of inductive elements for minimizing radial non-uniformity in plasmaBENJAMIN NEIL·Filed 2008·Application pending·0 cites
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