Assignee
BENJAMIN NEIL MARTIN PAUL
US·2 granted patents·1 pending application·17 citations·filing 2010–2011
Top patents by PatentIndex Score
3 records- 0192US8692467B2Synchronized and shortened master-slave RF pulsing in a plasma processing chamberBENJAMIN NEIL MARTIN PAUL·Filed 2011·Granted Apr 8, 2014·17 cites·30 claims
- 0250US9174296B2Plasma ignition and sustaining methods and apparatusesBENJAMIN NEIL MARTIN PAUL·Filed 2010·Granted Nov 3, 2015·0 cites·20 claims
- 0339US2011253310A1Methods and apparatus for an induction coil arrangement in a plasma processing systemBENJAMIN NEIL MARTIN PAUL·Filed 2011·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when BENJAMIN NEIL MARTIN PAUL files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →