Assignee
BENZEL HUBERT
DE·7 granted patents·5 pending applications·12 citations·filing 2005–2012
Top patents by PatentIndex Score
12 records- 0181US8123963B2Method for producing a semiconductor component and a semiconductor component produced according to the methodBENZEL HUBERT·Filed 2008·Granted Feb 28, 2012·5 cites·23 claims
- 0267US8250925B2Workpiece composite having a preform and a gelBENZEL HUBERT·Filed 2009·Granted Aug 28, 2012·5 cites·16 claims
- 0357US8749013B2Sensor and method for its productionBENZEL HUBERT·Filed 2007·Granted Jun 10, 2014·2 cites·19 claims
- 0451US8232126B2Manufacturing method for a micromechanical component, corresponding composite component, and corresponding micromechanical componentBENZEL HUBERT·Filed 2009·Granted Jul 31, 2012·0 cites·13 claims
- 0549US8901684B2Manufacturing method for a micromechanical component, corresponding composite component, and corresponding micromechanical componentBENZEL HUBERT·Filed 2012·Granted Dec 2, 2014·0 cites·6 claims
- 0645US2010133631A1Differential-pressure sensor system and corresponding production methodBENZEL HUBERT·Filed 2008·Application pending·0 cites
- 0744US8759136B2Method for creating monocrystalline piezoresistorsBENZEL HUBERT·Filed 2012·Granted Jun 24, 2014·0 cites·18 claims
- 0842US2008254635A1Method for Accelerated Etching of SiliconBENZEL HUBERT·Filed 2006·Application pending·0 cites
- 0939US2011220471A1Micromechanical component and method for manufacturing a micromechanical componentBENZEL HUBERT·Filed 2011·Application pending·0 cites
- 1038US8318544B2Method for manufacturing a plurality of thin chips and correspondingly manufactured thin chipBENZEL HUBERT·Filed 2010·Granted Nov 27, 2012·0 cites·11 claims
- 1135US2011073969A1Sensor system and method for manufacturing sameBENZEL HUBERT·Filed 2010·Application pending·0 cites
- 1233US2011108932A1Micromechanical Capacitive Sensor ElementBENZEL HUBERT·Filed 2005·Application pending·0 cites
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