Assignee
BERA KALLOL
US5 patents
Top patents by PatentIndex Score
US8512509B2Aug 20, 2013
Plasma reactor gas distribution plate with radially distributed path splitting manifold
BERA KALLOL217 citations99
US8231799B2Jul 31, 2012
Plasma reactor apparatus with multiple gas injection zones having time-changing separate configurable gas compositions for each zone
BERA KALLOL557 citations98
US8236105B2Aug 7, 2012
Apparatus for controlling gas flow in a semiconductor substrate processing chamber
BERA KALLOL22 citations92
US9267742B2Feb 23, 2016
Apparatus for controlling the temperature uniformity of a substrate
BERA KALLOL5 citations83
US8894805B2Nov 25, 2014
Electron beam plasma source with profiled magnet shield for uniform plasma generation
BERA KALLOL0 citations41