Assignee

BERG JONAS S T

SE·1 granted patent·2 citations·filing 2009–2009

Technology mixB82B1 B82Y1 C01B1 C23C1 G02B1 H01B1

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1 record

0159US8508049B2Deposition and selective removal of conducting helplayer for nanostructure processingBERG JONAS S T·Filed 2009·Granted Aug 13, 2013·2 cites·28 claims

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