Assignee

BERGER GABRIEL

US·2 granted patents·6 citations·filing 2007–2009

Technology mixG03F2

Top patents by PatentIndex Score

2 records

0177US8120753B2Method, program product and apparatus for generating a calibrated pupil kernel and method of using the same in a lithography simulation processBERGER GABRIEL·Filed 2007·Granted Feb 21, 2012·6 cites·21 claims
0242US8151223B2Source mask optimization for microcircuit designBERGER GABRIEL·Filed 2009·Granted Apr 3, 2012·0 cites·3 claims

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