Assignee
BIJNEN FRANCISCUS GODEFRIDUS CASPER
NL·4 granted patents·30 citations·filing 2008–2011
Top patents by PatentIndex Score
4 records- 0192US8208121B2Alignment mark and a method of aligning a substrate comprising such an alignment markBIJNEN FRANCISCUS GODEFRIDUS CASPER·Filed 2009·Granted Jun 26, 2012·24 cites·34 claims
- 0287US9046385B2Alignment measurement system, lithographic apparatus, and a method to determine alignment in a lithographic apparatusBIJNEN FRANCISCUS GODEFRIDUS CASPER·Filed 2011·Granted Jun 2, 2015·5 cites·13 claims
- 0357US8908152B2Lithographic apparatus and device manufacturing method to determine improved absolute position of exposure fields using mark structuresBIJNEN FRANCISCUS GODEFRIDUS CASPER·Filed 2009·Granted Dec 9, 2014·1 cites·22 claims
- 0457US8169593B2Lithographic apparatus and device manufacturing methodBIJNEN FRANCISCUS GODEFRIDUS CASPER·Filed 2008·Granted May 1, 2012·0 cites·10 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →