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BLEIDISTEL SASCHA
DE6 patents
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Microlithographic projection exposure apparatus
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Catadioptric projection objective including a reflective optical component and a measuring device
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US8760744B2Jun 24, 2014
Correction of optical elements by correction light irradiated in a flat manner
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Projection exposure apparatus and optical system
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US9110388B2Aug 18, 2015
Projection exposure apparatus with multiple sets of piezoelectric elements moveable in different directions and related method
BLEIDISTEL SASCHA0 citations51
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Semiconductor microlithography projection exposure apparatus
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