Assignee
BLUCK TERRY
US5 patents
Top patents by PatentIndex Score
US8293066B2Oct 23, 2012
Apparatus and methods for transporting and processing substrates
BLUCK TERRY23 citations91
US8303764B2Nov 6, 2012
Apparatus and methods for transporting and processing substrates
BLUCK TERRY13 citations83
US9524896B2Dec 20, 2016
Apparatus and methods for transporting and processing substrates
BLUCK TERRY4 citations72
US8206551B2Jun 26, 2012
Processing thin wafers
BLUCK TERRY2 citations61
US8087380B2Jan 3, 2012
Evaporative system for solar cell fabrication
BLUCK TERRY0 citations51