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BLUE29 LLC
US10 patents
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US6881437B2Apr 19, 2005
Methods and system for processing a microelectronic topography
BLUE29 LLC112 citations98
US6913651B2Jul 5, 2005
Apparatus and method for electroless deposition of materials on semiconductor substrates
BLUE29 LLC67 citations97
US6860944B2Mar 1, 2005
Microelectronic fabrication system components and method for processing a wafer using such components
BLUE29 LLC55 citations96
US6902605B2Jun 7, 2005
Activation-free electroless solution for deposition of cobalt and method for deposition of cobalt capping/passivation layer on copper
BLUE29 LLC53 citations95
US7235483B2Jun 26, 2007
Method of electroless deposition of thin metal and dielectric films with temperature controlled stages of film growth
BLUE29 LLC26 citations92
US6911067B2Jun 28, 2005
Solution composition and method for electroless deposition of coatings free of alkali metals
BLUE29 LLC30 citations92
US6908512B2Jun 21, 2005
Temperature-controlled substrate holder for processing in fluids
BLUE29 LLC34 citations92
US6846519B2Jan 25, 2005
Method and apparatus for electroless deposition with temperature-controlled chuck
BLUE29 LLC13 citations83
US6935638B2Aug 30, 2005
Universal substrate holder for treating objects in fluids
BLUE29 LLC18 citations82
US6939403B2Sep 6, 2005
Spatially-arranged chemical processing station
BLUE29 LLC10 citations73