Assignee
BOGUSLAVSKIY VADIM
US·3 granted patents·9 citations·filing 2011–2012
Top patents by PatentIndex Score
3 records- 0183US9653340B2Heated wafer carrier profilingBOGUSLAVSKIY VADIM·Filed 2012·Granted May 16, 2017·6 cites·16 claims
- 0269US8958061B2Heated wafer carrier profilingBOGUSLAVSKIY VADIM·Filed 2012·Granted Feb 17, 2015·2 cites·33 claims
- 0365US8231940B2Wafer processing method with carrier hub removalBOGUSLAVSKIY VADIM·Filed 2011·Granted Jul 31, 2012·1 cites·15 claims
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