Assignee

BOWERING NORBERT R

US·2 granted patents·6 citations·filing 2010–2011

Technology mixG02B2 G03F2 G21K2 B82Y1 G01J1 H05G1

Top patents by PatentIndex Score

2 records

0180US8598549B2EUV opticsBOWERING NORBERT R·Filed 2010·Granted Dec 3, 2013·4 cites·17 claims
0268US8314398B2EUV light source components and methods for producing, using and refurbishing sameBOWERING NORBERT R·Filed 2011·Granted Nov 20, 2012·2 cites·23 claims

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