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BRCKA JOZEF

US7 patents

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US8715455B2May 6, 2014

Multi-zone gas distribution system for a treatment system

BRCKA JOZEF21 citations92
US8409398B2Apr 2, 2013

Control of ion angular distribution function at wafer surface

BRCKA JOZEF24 citations92
US8103492B2Jan 24, 2012

Plasma fluid modeling with transient to stochastic transformation

BRCKA JOZEF37 citations92
US8480914B2Jul 9, 2013

Multiple gas plasma forming method and ICP source

BRCKA JOZEF2 citations62
US9228261B2Jan 5, 2016

System and method for tissue construction using an electric field applicator

BRCKA JOZEF1 citations52
US8916055B2Dec 23, 2014

Method and device for controlling pattern and structure formation by an electric field

BRCKA JOZEF1 citations51
US8092658B2Jan 10, 2012

Method and apparatus of distributed plasma processing system for conformal ion stimulated nanoscale deposition process

BRCKA JOZEF0 citations41