Assignee
BREWER SCIENCE INC
US149 patents
Top patents by PatentIndex Score
US5693691ADec 2, 1997
Thermosetting anti-reflective coatings compositions
BREWER SCIENCE INC166 citations98
US5919599AJul 6, 1999
Thermosetting anti-reflective coatings at deep ultraviolet
BREWER SCIENCE INC157 citations96
US4950583AAug 21, 1990
Adhesion promoting product and process for treating an integrated circuit substrate therewith
BREWER SCIENCE INC54 citations96
US4910122AMar 20, 1990
Anti-reflective coating
BREWER SCIENCE INC295 citations96
US4732858AMar 22, 1988
Adhesion promoting product and process for treating an integrated circuit substrate
BREWER SCIENCE INC67 citations96
US7026237B2Apr 11, 2006
Fill material for dual damascene processes
BREWER SCIENCE INC60 citations95
US6391472B1May 21, 2002
Fill material for dual damascene processes
BREWER SCIENCE INC45 citations95
US6323310B1Nov 27, 2001
Anti-reflective coating compositions comprising polymerized aminoplasts
BREWER SCIENCE INC51 citations95
US6080530AJun 27, 2000
Thermosetting polyester anti-reflective coatings for multilayer photoresist processes
BREWER SCIENCE INC39 citations95
US5935760AAug 10, 1999
Thermosetting polyester anti-reflective coatings for multilayer photoresist processes
BREWER SCIENCE INC84 citations95
US5919598AJul 6, 1999
Method for making multilayer resist structures with thermosetting anti-reflective coatings
BREWER SCIENCE INC62 citations95
US6156479ADec 5, 2000
Thermosetting anti-refective coatings
BREWER SCIENCE INC85 citations94
US5674648AOct 7, 1997
Anti-reflective coating
BREWER SCIENCE INC57 citations94
US5505093AApr 9, 1996
Homogeneously conductive polymer films as strain gauges
BREWER SCIENCE INC53 citations94
US5336925AAug 9, 1994
Positive working polyamic acid/imide photoresist compositions and their use as dielectrics
BREWER SCIENCE INC76 citations94
US8968989B2Mar 3, 2015
Assist layers for EUV lithography
BREWER SCIENCE INC297 citations93
US6716767B2Apr 6, 2004
Contact planarization materials that generate no volatile byproducts or residue during curing
BREWER SCIENCE INC101 citations93
US5281690AJan 25, 1994
Base-soluble polyimide release layers for use in microlithographic processing
BREWER SCIENCE INC62 citations93
US5234990AAug 10, 1993
Polymers with intrinsic light-absorbing properties for anti-reflective coating applications in deep ultraviolet microlithography
BREWER SCIENCE INC61 citations93
US6872506B2Mar 29, 2005
Wet-developable anti-reflective compositions
BREWER SCIENCE INC22 citations92
US6524708B2Feb 25, 2003
Anti-reflective coating compositions comprising polymerized aminoplasts
BREWER SCIENCE INC17 citations92
US6316160B1Nov 13, 2001
Fast-etching, thermosetting anti-reflective coatings derived from cellulosic binders
BREWER SCIENCE INC33 citations92
US5780201AJul 14, 1998
Ultra thin photolithographically imageable organic black matrix coating material
BREWER SCIENCE INC54 citations92
US5340619AAug 23, 1994
Method of manufacturing a color filter array
BREWER SCIENCE INC118 citations92
US6042990AMar 28, 2000
Thermosetting polyester anti-reflective coatings for multilayer photoresist processes
BREWER SCIENCE INC24 citations91
US5892096AApr 6, 1999
Non-subliming mid-UV dyes and ultra-thin organic arcs having differential solubility
BREWER SCIENCE INC36 citations91
US5688987ANov 18, 1997
Non-subliming Mid-UV dyes and ultra-thin organic arcs having differential solubility
BREWER SCIENCE INC26 citations91
US5362608ANov 8, 1994
Microlithographic substrate cleaning and compositions therefor
BREWER SCIENCE INC49 citations91
US4876165AOct 24, 1989
Light filters for microelectronics
BREWER SCIENCE INC67 citations91
US4822718AApr 18, 1989
Light absorbing coating
BREWER SCIENCE INC93 citations91
US7935780B2May 3, 2011
High-temperature spin-on temporary bonding compositions
BREWER SCIENCE INC28 citations90
US6846612B2Jan 25, 2005
Organic anti-reflective coating compositions for advanced microlithography
BREWER SCIENCE INC28 citations90
US5753523AMay 19, 1998
Method for making airbridge from ion-implanted conductive polymers
BREWER SCIENCE INC26 citations90
US5110697AMay 5, 1992
Multifunctional photolithographic compositions
BREWER SCIENCE INC24 citations90
US7713835B2May 11, 2010
Thermally decomposable spin-on bonding compositions for temporary wafer bonding
BREWER SCIENCE INC25 citations89
US7316844B2Jan 8, 2008
Spin-on protective coatings for wet-etch processing of microelectronic substrates
BREWER SCIENCE INC17 citations89
US6740469B2May 25, 2004
Developer-soluble metal alkoxide coatings for microelectronic applications
BREWER SCIENCE INC31 citations88
US6598765B2Jul 29, 2003
Disposable syringe dispenser system
BREWER SCIENCE INC22 citations86
US7939244B2May 10, 2011
Photosensitive hardmask for microlithography
BREWER SCIENCE INC11 citations84
US7803458B2Sep 28, 2010
Hybrid organic-inorganic polymer coatings with high refractive indices
BREWER SCIENCE INC8 citations84
US7108958B2Sep 19, 2006
Photosensitive bottom anti-reflective coatings
BREWER SCIENCE INC12 citations84
US7038328B2May 2, 2006
Anti-reflective compositions comprising triazine compounds
BREWER SCIENCE INC14 citations84
US9580294B2Feb 28, 2017
Computer program and method for verifying container of material to be dispensed
BREWER SCIENCE INC8 citations83
US9102129B2Aug 11, 2015
Spin-on carbon compositions for lithographic processing
BREWER SCIENCE INC6 citations83
US8895230B2Nov 25, 2014
Spin-on carbon compositions for lithographic processing
BREWER SCIENCE INC10 citations83
US7914974B2Mar 29, 2011
Anti-reflective imaging layer for multiple patterning process
BREWER SCIENCE INC7 citations83
US7608342B2Oct 27, 2009
Photocurable, conductive, transparent polymer coatings
BREWER SCIENCE INC8 citations83
US7449230B2Nov 11, 2008
Lithography pattern shrink process and articles
BREWER SCIENCE INC9 citations83
US7132216B2Nov 7, 2006
Non-aromatic chromophores for use in polymer anti-reflective coatings
BREWER SCIENCE INC12 citations83
US6852474B2Feb 8, 2005
Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition
BREWER SCIENCE INC15 citations83
Showing the top 50 of 149 patents by PatentIndex Score.