Assignee
BRILL BOAZ
IL4 patents
Top patents by PatentIndex Score
US8488128B2Jul 16, 2013
Line edge roughness measuring technique and test structure
BRILL BOAZ19 citations92
US10295329B2May 21, 2019
Monitoring system and method for verifying measurements in patterned structures
BRILL BOAZ3 citations70
US8658982B2Feb 25, 2014
Optical method and system utilizing operating with deep or vacuum UV spectra
BRILL BOAZ2 citations52
US9568872B2Feb 14, 2017
Process control using non-zero order diffraction
BRILL BOAZ0 citations51