Assignee
BROOKS AUTOMATION GMBH
DE·15 granted patents·1 pending application·260 citations·filing 1997–2023
Top patents by PatentIndex Score
16 records- 0192US6375403B1Loading and unloading station for semiconductor processing installationsBROOKS AUTOMATION GMBH·Filed 2000·Granted Apr 23, 2002·44 cites·68 claims
- 0288US6071059ALoading and unloading station for semiconductor processing installationsBROOKS AUTOMATION GMBH·Filed 1998·Granted Jun 6, 2000·68 cites·2 claims
- 0375US2023384753A1Method for controlling a plc using a pc programBROOKS AUTOMATION GMBH·Filed 2023·Application pending·0 cites
- 0474US6551049B2Device for controlling the drive of mechanisms operating separately from one anotherBROOKS AUTOMATION GMBH·Filed 2001·Granted Apr 22, 2003·15 cites·18 claims
- 0570US11726445B2Method for controlling a PLC using a PC programBROOKS AUTOMATION GMBH·Filed 2021·Granted Aug 15, 2023·0 cites·20 claims
- 0670US6418352B1Integrated material management moduleBROOKS AUTOMATION GMBH·Filed 1998·Granted Jul 9, 2002·38 cites·17 claims
- 0768US10892155B2Semiconductor cleaner systems and methodsBROOKS AUTOMATION GMBH·Filed 2018·Granted Jan 12, 2021·0 cites·22 claims
- 0865US11171024B2Reticle compartment and diffusor plateBROOKS AUTOMATION GMBH·Filed 2020·Granted Nov 9, 2021·0 cites·20 claims
- 0960US6641348B1Docking station for substrate transport containersBROOKS AUTOMATION GMBH·Filed 1998·Granted Nov 4, 2003·27 cites·18 claims
- 1056US10727098B2Reticle compartment and diffusor plateBROOKS AUTOMATION GMBH·Filed 2017·Granted Jul 28, 2020·0 cites·12 claims
- 1154US11137735B2Method for controlling a PLC using a PC programBROOKS AUTOMATION GMBH·Filed 2018·Granted Oct 5, 2021·0 cites·13 claims
- 1254US6205881B1Device for controlling the drive of mechanisms operating separately from one anotherBROOKS AUTOMATION GMBH·Filed 1998·Granted Mar 27, 2001·18 cites·7 claims
- 1350US6099059ADevice for the transfer of an object between at least two locationsBROOKS AUTOMATION GMBH·Filed 1998·Granted Aug 8, 2000·20 cites·11 claims
- 1446US6403945B2Device and method for detecting and distinguishing shelf-forming supports in cassettes and disk-shaped objects deposited thereonBROOKS AUTOMATION GMBH·Filed 1998·Granted Jun 11, 2002·16 cites·8 claims
- 1541US6211514B1Device and method for sensing wafer-shaped objects and shelves in a containerBROOKS AUTOMATION GMBH·Filed 1997·Granted Apr 3, 2001·14 cites·30 claims
- 1634US12487186B2Inspection system and method of inspection for substrate containersBROOKS AUTOMATION GMBH·Filed 2018·Granted Dec 2, 2025·0 cites·12 claims
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