Assignee
BRUIJSTENS JEROEN PETER JOHANNES
NL·2 granted patents·5 citations·filing 2009–2009
Top patents by PatentIndex Score
2 records- 0176US8730447B2Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structureBRUIJSTENS JEROEN PETER JOHANNES·Filed 2009·Granted May 20, 2014·3 cites·16 claims
- 0267US9176371B2Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structureBRUIJSTENS JEROEN PETER JOHANNES·Filed 2009·Granted Nov 3, 2015·2 cites·21 claims
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