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BRUSIC VLASTA
US3 patents
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US9343330B2May 17, 2016
Compositions for polishing aluminum/copper and titanium in damascene structures
BRUSIC VLASTA41 citations92
US8062096B2Nov 22, 2011
Use of CMP for aluminum mirror and solar cell fabrication
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US8425797B2Apr 23, 2013
Compositions for polishing aluminum/copper and titanium in damascene structures
BRUSIC VLASTA1 citations51