Assignee
BTU ENG CORP
US·25 granted patents·2,066 citations·filing 1975–1991
Top patents by PatentIndex Score
25 records- 0197US4802441ADouble wall fast cool-down furnaceBTU ENG CORP·Filed 1987·Granted Feb 7, 1989·379 cites·7 claims
- 0295US4854266ACross-flow diffusion furnaceBTU ENG CORP·Filed 1987·Granted Aug 8, 1989·532 cites·7 claims
- 0394US4753192AMovable core fast cool-down furnaceBTU ENG CORP·Filed 1987·Granted Jun 28, 1988·595 cites·7 claims
- 0494US4672997AModular, self-diagnostic mass-flow controller and systemBTU ENG CORP·Filed 1984·Granted Jun 16, 1987·116 cites·18 claims
- 0594US4586898AMulti-zone furnace systemBTU ENG CORP·Filed 1984·Granted May 6, 1986·31 cites·6 claims
- 0688US4276603ADiffusion furnace microcontrollerBTU ENG CORP·Filed 1979·Granted Jun 30, 1981·41 cites·21 claims
- 0786US4701096AWafer handling stationBTU ENG CORP·Filed 1986·Granted Oct 20, 1987·78 cites·21 claims
- 0880US4573431AModular V-CVD diffusion furnaceBTU ENG CORP·Filed 1985·Granted Mar 4, 1986·46 cites·4 claims
- 0977US4054411AHigh temperature furnace door sealBTU ENG CORP·Filed 1976·Granted Oct 18, 1977·16 cites·7 claims
- 1075US4091355AAnchored coil heaterBTU ENG CORP·Filed 1977·Granted May 23, 1978·18 cites·6 claims
- 1174US5124180AMethod for the formation of fluorine doped metal oxide filmsBTU ENG CORP·Filed 1991·Granted Jun 23, 1992·39 cites·18 claims
- 1273US4484538AApparatus for providing depletion-free uniform thickness CVD thin-film on semiconductor wafersBTU ENG CORP·Filed 1983·Granted Nov 27, 1984·19 cites·12 claims
- 1369US4556584AMethod for providing substantially waste-free chemical vapor deposition of thin-film on semiconductor substratesBTU ENG CORP·Filed 1984·Granted Dec 3, 1985·25 cites·7 claims
- 1466US4032290AHigh temperature furnace muffleBTU ENG CORP·Filed 1976·Granted Jun 28, 1977·13 cites·10 claims
- 1565US4116619AMultiple beam furnaceBTU ENG CORP·Filed 1977·Granted Sep 26, 1978·10 cites·9 claims
- 1659US3984615AElectrical resistance furnace heaterBTU ENG CORP·Filed 1975·Granted Oct 5, 1976·15 cites·11 claims
- 1757US4272639AHelically wound heaterBTU ENG CORP·Filed 1979·Granted Jun 9, 1981·14 cites·19 claims
- 1857US4080510ASilicon carbide heaterBTU ENG CORP·Filed 1976·Granted Mar 21, 1978·14 cites·9 claims
- 1957US4033715AHeat processing systemBTU ENG CORP·Filed 1976·Granted Jul 5, 1977·8 cites·4 claims
- 2054US4829282AHigh efficiency high heat output electrical heater assemblyBTU ENG CORP·Filed 1988·Granted May 9, 1989·10 cites·10 claims
- 2148US4872799ABoat transfer and queuing furnace elevator and methodBTU ENG CORP·Filed 1987·Granted Oct 10, 1989·17 cites·5 claims
- 2245US4624638ACVD boat loading mechanism having a separable, low profile cantilevered paddle assemblyBTU ENG CORP·Filed 1984·Granted Nov 25, 1986·10 cites·12 claims
- 2342US4752219AWafer softlanding system and cooperative door assemblyBTU ENG CORP·Filed 1986·Granted Jun 21, 1988·11 cites·17 claims
- 2437US3984616AHigh temperature furnace heaterBTU ENG CORP·Filed 1975·Granted Oct 5, 1976·5 cites·7 claims
- 2527US4687911AElectric furnace heaterBTU ENG CORP·Filed 1985·Granted Aug 18, 1987·4 cites·9 claims
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