Assignee

BUDACH MICHAEL

DE2 patents

Top patents by PatentIndex Score

US8674329B2Mar 18, 2014

Method and apparatus for analyzing and/or repairing of an EUV mask defect

BUDACH MICHAEL4 citations70

US8316698B2Nov 27, 2012

Determining a repairing form of a defect at or close to an edge of a substrate of a photo mask

BUDACH MICHAEL3 citations60