Assignee
BUIS EDWIN JOHAN
NL·3 granted patents·1 citations·filing 2009–2010
Top patents by PatentIndex Score
3 records- 0163US8817232B2Optical apparatus, and method of orienting a reflective elementBUIS EDWIN JOHAN·Filed 2010·Granted Aug 26, 2014·1 cites·22 claims
- 0250US8279408B2Object support positioning device and lithographic apparatusBUIS EDWIN JOHAN·Filed 2009·Granted Oct 2, 2012·0 cites·26 claims
- 0349US8757823B2Mountings for rotation of array of reflective elements and lithographic apparatus incorporating sameBUIS EDWIN JOHAN·Filed 2010·Granted Jun 24, 2014·0 cites·15 claims
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