Assignee

BURKHARDT MARTIN

US2 patents

Top patents by PatentIndex Score

US9058997B2Jun 16, 2015

Process of multiple exposures with spin castable films

BURKHARDT MARTIN3 citations59

US8507346B2Aug 13, 2013

Method of forming a semiconductor device having a cut-way hole to expose a portion of a hardmask layer

BURKHARDT MARTIN0 citations48