Assignee
BURNS SEAN D
US·3 granted patents·5 citations·filing 2006–2010
Top patents by PatentIndex Score
3 records- 0171US8084185B2Substrate planarization with imprint materials and processesBURNS SEAN D·Filed 2009·Granted Dec 27, 2011·3 cites·26 claims
- 0267US8323871B2Antireflective hardmask composition and a method of preparing a patterned material using sameBURNS SEAN D·Filed 2010·Granted Dec 4, 2012·2 cites·18 claims
- 0345US8734209B2Chimney capBURNS SEAN D·Filed 2006·Granted May 27, 2014·0 cites·23 claims
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