Assignee
BUTLER HANS
NL27 patents
Top patents by PatentIndex Score
US8319940B2Nov 27, 2012
Position measurement system and lithographic apparatus
BUTLER HANS18 citations92
US8705004B2Apr 22, 2014
Lithographic method and apparatus
BUTLER HANS20 citations89
US8164737B2Apr 24, 2012
Lithographic apparatus having an active damping subassembly
BUTLER HANS11 citations82
US9229339B2Jan 5, 2016
Positioning system, a lithographic apparatus and a method for positional control
BUTLER HANS4 citations73
US9715171B2Jul 25, 2017
Imprint lithographic apparatus and imprint lithographic method
BUTLER HANS4 citations71
US8730451B2May 20, 2014
Lithographic apparatus for transferring pattern from patterning device onto substrate, and damping method
BUTLER HANS6 citations71
US8144310B2Mar 27, 2012
Positioning system, lithographic apparatus and device manufacturing method
BUTLER HANS5 citations71
US9378722B2Jun 28, 2016
Lithographic apparatus with actuator to compensate acoustic vibration
BUTLER HANS6 citations70
US8553199B2Oct 8, 2013
Lithographic apparatus and device manufacturing method
BUTLER HANS6 citations70
US9746312B2Aug 29, 2017
Lithographic apparatus and method for measuring a position
BUTLER HANS2 citations69
US9261799B2Feb 16, 2016
Movable support, position control system, lithographic apparatus and method of controlling a position of an exchangeable object
BUTLER HANS2 citations63
US9195128B2Nov 24, 2015
Enhancing alignment in lithographic apparatus device manufacture
BUTLER HANS2 citations63
US8908146B2Dec 9, 2014
Actuator system, lithographic apparatus, and device manufacturing method
BUTLER HANS3 citations63
US8619232B2Dec 31, 2013
Method for damping an object, an active damping system, and a lithographic apparatus
BUTLER HANS3 citations63
US8446567B2May 21, 2013
Stage system calibration method, stage system and lithographic apparatus comprising an encoder measurement system to measure position of stage system
BUTLER HANS3 citations63
US9110387B2Aug 18, 2015
Lithographic apparatus comprising a substrate table and a surface substrate actuator
BUTLER HANS3 citations62
US8994919B2Mar 31, 2015
Lithographic apparatus and device manufacturing method
BUTLER HANS2 citations62
US8245824B2Aug 21, 2012
Combination of structure and an active damping system, and a lithographic apparatus
BUTLER HANS4 citations60
US8243258B2Aug 14, 2012
Lithographic apparatus having acoustic resonator
BUTLER HANS5 citations60
US8059259B2Nov 15, 2011
Damping arrangement, active damping system, lithographic apparatus, and projection assembly
BUTLER HANS6 citations60
US8913229B2Dec 16, 2014
Multi-stage system, a control method therefor, and a lithographic apparatus
BUTLER HANS0 citations52
US9122173B2Sep 1, 2015
Positioning system, lithographic apparatus and device manufacturing method
BUTLER HANS1 citations50
US8743344B2Jun 3, 2014
Cable connection, control system, and method to decrease the passing on of vibrations from a first object to a second object
BUTLER HANS1 citations50
US8717532B2May 6, 2014
Active mount, lithographic apparatus comprising such active mount and method for tuning such active mount
BUTLER HANS0 citations45
US8922749B2Dec 30, 2014
Lithographic apparatus and patterning device
BUTLER HANS0 citations42
US8781775B2Jul 15, 2014
Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatus
BUTLER HANS0 citations41
US8493553B2Jul 23, 2013
Lithographic apparatus having a feed forward pressure pulse compensation for the metrology frame
BUTLER HANS0 citations41