Assignee
BYKANOV ALEXANDER N
US·4 granted patents·69 citations·filing 2008–2012
Top patents by PatentIndex Score
4 records- 0197US8198615B2Gas management system for a laser-produced-plasma EUV light sourceBYKANOV ALEXANDER N·Filed 2010·Granted Jun 12, 2012·21 cites·20 claims
- 0293US8704200B2Laser produced plasma EUV light sourceBYKANOV ALEXANDER N·Filed 2012·Granted Apr 22, 2014·11 cites·20 claims
- 0391US8633459B2Systems and methods for optics cleaning in an EUV light sourceBYKANOV ALEXANDER N·Filed 2011·Granted Jan 21, 2014·11 cites·20 claims
- 0489US8519366B2Debris protection system having a magnetic field for an EUV light sourceBYKANOV ALEXANDER N·Filed 2008·Granted Aug 27, 2013·26 cites·23 claims
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