Assignee
BYUN CHULSOO
3 granted patents·515 citations·filing 2002–2010
Top patents by PatentIndex Score
3 records- 0194US9315897B2Showerhead for film depositing vacuum equipmentBYUN CHULSOO·Filed 2010·Granted Apr 19, 2016·492 cites·6 claims
- 0278US7156921B2Method and apparatus for chemical vapor deposition capable of preventing contamination and enhancing film growth rateBYUN CHULSOO·Filed 2002·Granted Jan 2, 2007·23 cites·1 claims
- 0356US7485339B2Method for chemical vapor deposition capable of preventing contamination and enhancing film growth rateBYUN CHULSOO·Filed 2006·Granted Feb 3, 2009·0 cites·7 claims
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