Assignee
CANON ANELVA CORP
JP·228 granted patents·175 pending applications·1,335 citations·filing 2002–2025
Top patents by PatentIndex Score
403 records- 0199US7780790B2Vacuum processing apparatusCANON ANELVA CORP·Filed 2009·Granted Aug 24, 2010·96 cites·3 claims
- 0298US10743396B1X-ray generation apparatus and X-ray imaging apparatusCANON ANELVA CORP·Filed 2020·Granted Aug 11, 2020·10 cites·16 claims
- 0397US12241848B2Inspection apparatus and inspection methodCANON ANELVA CORP·Filed 2023·Granted Mar 4, 2025·1 cites·23 claims
- 0497US11977038B2Inspection apparatus and inspection methodCANON ANELVA CORP·Filed 2023·Granted May 7, 2024·1 cites·22 claims
- 0597US11971370B2Inspection apparatus and inspection methodCANON ANELVA CORP·Filed 2023·Granted Apr 30, 2024·1 cites·19 claims
- 0697US11927554B2Inspection apparatus and inspection methodCANON ANELVA CORP·Filed 2023·Granted Mar 12, 2024·1 cites·18 claims
- 0797US11921059B2Inspection apparatus and inspection methodCANON ANELVA CORP·Filed 2023·Granted Mar 5, 2024·1 cites·20 claims
- 0897US10841515B1X-ray generation tube, X-ray generation apparatus, and X-ray imaging apparatusCANON ANELVA CORP·Filed 2020·Granted Nov 17, 2020·7 cites·13 claims
- 0997US7780440B2Substrate supporting/transferring trayCANON ANELVA CORP·Filed 2005·Granted Aug 24, 2010·545 cites·10 claims
- 1096US10083830B2Substrate cleaning method for removing oxide filmCANON ANELVA CORP·Filed 2016·Granted Sep 25, 2018·67 cites·18 claims
- 1196US7977243B2Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatusCANON ANELVA CORP·Filed 2010·Granted Jul 12, 2011·37 cites·7 claims
- 1295US11784030B2Plasma processing apparatusCANON ANELVA CORP·Filed 2022·Granted Oct 10, 2023·4 cites·17 claims
- 1394US9425029B2Processing apparatus having a first shield and a second shield arranged to sandwich a substrateCANON ANELVA CORP·Filed 2015·Granted Aug 23, 2016·10 cites·12 claims
- 1493US11600466B2Plasma processing apparatus, plasma processing method, and memory mediumCANON ANELVA CORP·Filed 2020·Granted Mar 7, 2023·3 cites·27 claims
- 1592US12342446B2X-ray generation apparatus and x-ray imaging apparatusCANON ANELVA CORP·Filed 2024·Granted Jun 24, 2025·0 cites·13 claims
- 1692US11569070B2Plasma processing apparatusCANON ANELVA CORP·Filed 2019·Granted Jan 31, 2023·9 cites·14 claims
- 1792US9685299B2Substrate processing apparatus, etching method of metal film, and manufacturing method of magnetoresistive effect elementCANON ANELVA CORP·Filed 2012·Granted Jun 20, 2017·14 cites·16 claims
- 1891US12336082B2X-ray generating apparatus, x-ray imaging apparatus, and mold transformerCANON ANELVA CORP·Filed 2024·Granted Jun 17, 2025·0 cites·11 claims
- 1991US9391274B2Nonvolatile memory element and method of manufacturing the sameCANON ANELVA CORP·Filed 2015·Granted Jul 12, 2016·3 cites·4 claims
- 2091USRE40951EDry etching method for magnetic materialCANON ANELVA CORP·Filed 2008·Granted Nov 10, 2009·23 cites·25 claims
- 2191US2024369502A1Inspection apparatus and inspection methodCANON ANELVA CORP·Filed 2024·Application pending·0 cites
- 2291US2025349490A1X-ray generation apparatus and x-ray imaging apparatusCANON ANELVA CORP·Filed 2025·Application pending·0 cites
- 2390US11140763B2X-ray generation apparatus and X-ray imaging apparatusCANON ANELVA CORP·Filed 2021·Granted Oct 5, 2021·2 cites·14 claims
- 2490US8016537B2Inline-type wafer conveyance deviceCANON ANELVA CORP·Filed 2010·Granted Sep 13, 2011·12 cites·15 claims
- 2590US7848077B2Electrostatic chuck deviceCANON ANELVA CORP·Filed 2009·Granted Dec 7, 2010·10 cites·3 claims
- 2689US12177958B2X-ray generating apparatus, X-ray imaging apparatus, and mold transformerCANON ANELVA CORP·Filed 2024·Granted Dec 24, 2024·0 cites·14 claims
- 2789US11600469B2Plasma processing apparatusCANON ANELVA CORP·Filed 2019·Granted Mar 7, 2023·5 cites·19 claims
- 2889US10224463B2Film forming method, method of manufacturing semiconductor light-emitting device, semiconductor light-emitting device, and illuminating deviceCANON ANELVA CORP·Filed 2015·Granted Mar 5, 2019·7 cites·9 claims
- 2989US9991102B2Sputtering apparatus, film deposition method, and control deviceCANON ANELVA CORP·Filed 2015·Granted Jun 5, 2018·3 cites·6 claims
- 3088US12505979B2Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assemblyCANON ANELVA CORP·Filed 2024·Granted Dec 23, 2025·0 cites·1 claims
- 3188US9980357B1X-ray generating device and x-ray photography systemCANON ANELVA CORP·Filed 2017·Granted May 22, 2018·3 cites·3 claims
- 3288US8378576B2Ion beam generatorCANON ANELVA CORP·Filed 2010·Granted Feb 19, 2013·12 cites·10 claims
- 3388US7850827B2Double-layer shutter control method of multi-sputtering systemCANON ANELVA CORP·Filed 2005·Granted Dec 14, 2010·8 cites·11 claims
- 3487US11756773B2Plasma processing apparatusCANON ANELVA CORP·Filed 2021·Granted Sep 12, 2023·1 cites·16 claims
- 3587US11626270B2Plasma processing apparatusCANON ANELVA CORP·Filed 2019·Granted Apr 11, 2023·2 cites·18 claims
- 3687US9564360B2Substrate processing method and method of manufacturing semiconductor deviceCANON ANELVA CORP·Filed 2016·Granted Feb 7, 2017·7 cites·17 claims
- 3787US7955480B2Sputtering apparatus and film deposition methodCANON ANELVA CORP·Filed 2010·Granted Jun 7, 2011·4 cites·14 claims
- 3887US7867847B2Method of manufacturing dielectric film that has hafnium-containing and aluminum-containing oxynitrideCANON ANELVA CORP·Filed 2010·Granted Jan 11, 2011·7 cites·9 claims
- 3986US8377270B2Plasma processing apparatus, magnetoresistive device manufacturing apparatus, magnetic thin film forming method, and film formation control programCANON ANELVA CORP·Filed 2009·Granted Feb 19, 2013·7 cites·2 claims
- 4086US7791857B2Electrostatic chuck deviceCANON ANELVA CORP·Filed 2008·Granted Sep 7, 2010·7 cites·6 claims
- 4186US7623334B2Electrostatic chuck deviceCANON ANELVA CORP·Filed 2003·Granted Nov 24, 2009·25 cites·10 claims
- 4286US2025351257A1X-ray generation apparatus and x-ray imaging apparatusCANON ANELVA CORP·Filed 2025·Application pending·0 cites
- 4386US2025351255A1X-ray generation apparatus and x-ray imaging apparatusCANON ANELVA CORP·Filed 2025·Application pending·0 cites
- 4485US12338526B2Deposition apparatusCANON ANELVA CORP·Filed 2023·Granted Jun 24, 2025·0 cites·9 claims
- 4585US9322094B2Film-forming apparatusCANON ANELVA CORP·Filed 2013·Granted Apr 26, 2016·4 cites·16 claims
- 4685US7785449B2Magnetron unit, magnetron sputtering apparatus, and method of manufacturing electronic deviceCANON ANELVA CORP·Filed 2009·Granted Aug 31, 2010·11 cites·20 claims
- 4784US11289305B2Deposition method and deposition apparatusCANON ANELVA CORP·Filed 2020·Granted Mar 29, 2022·2 cites·12 claims
- 4884US10636634B2Sputtering apparatus, film deposition method, and control deviceCANON ANELVA CORP·Filed 2018·Granted Apr 28, 2020·1 cites·3 claims
- 4984US10222287B2Cold cathode ionization gauge and cold cathode ionization gauge cartridgeCANON ANELVA CORP·Filed 2017·Granted Mar 5, 2019·4 cites·17 claims
- 5084US9502644B1Method for manufacturing magnetoresistive deviceCANON ANELVA CORP·Filed 2016·Granted Nov 22, 2016·5 cites·4 claims
Showing the top 50 of 403 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when CANON ANELVA CORP files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →