Assignee
CANON NANOTECHNOLOGIES INC
US·8 granted patents·2 pending applications·27 citations·filing 2014–2019
Top patents by PatentIndex Score
10 records- 0189US9090014B2High throughput imprint based on contact line motion tracking controlCANON NANOTECHNOLOGIES INC·Filed 2015·Granted Jul 28, 2015·7 cites·14 claims
- 0288US9529274B2Chucking system with recessed support featureCANON NANOTECHNOLOGIES INC·Filed 2014·Granted Dec 27, 2016·6 cites·26 claims
- 0386US9651862B2Drop pattern generation for imprint lithography with directionally-patterned templatesCANON NANOTECHNOLOGIES INC·Filed 2014·Granted May 16, 2017·5 cites·19 claims
- 0480US10578964B2Asymmetric template shape modulation for partial field imprintingCANON NANOTECHNOLOGIES INC·Filed 2014·Granted Mar 3, 2020·3 cites·6 claims
- 0578US11199772B2Adjacent field alignmentCANON NANOTECHNOLOGIES INC·Filed 2019·Granted Dec 14, 2021·1 cites·19 claims
- 0676US9514950B2Methods for uniform imprint pattern transfer of sub-20 nm featuresCANON NANOTECHNOLOGIES INC·Filed 2014·Granted Dec 6, 2016·3 cites·20 claims
- 0775US9778578B2Low contact imprint lithography template chuck system for improved overlay correctionCANON NANOTECHNOLOGIES INC·Filed 2014·Granted Oct 3, 2017·2 cites·16 claims
- 0858US2015165671A1Safe separation for nano imprintingCANON NANOTECHNOLOGIES INC·Filed 2015·Application pending·0 cites
- 0949US10124529B2Imprint lithography template and method for zero-gap imprintingCANON NANOTECHNOLOGIES INC·Filed 2014·Granted Nov 13, 2018·0 cites·11 claims
- 1048US2015165655A1Optically Absorptive Material for Alignment MarksCANON NANOTECHNOLOGIES INC·Filed 2015·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →