Assignee
CANON SALES CO INC
US·44 granted patents·2,260 citations·filing 1992–2002
Top patents by PatentIndex Score
44 records- 0198US5620523AApparatus for forming filmCANON SALES CO INC·Filed 1995·Granted Apr 15, 1997·215 cites·18 claims
- 0297US6212789B1Semiconductor device manufacturing systemCANON SALES CO INC·Filed 1998·Granted Apr 10, 2001·543 cites·17 claims
- 0397US5915200AFilm forming method and semiconductor device manufacturing methodCANON SALES CO INC·Filed 1997·Granted Jun 22, 1999·335 cites·20 claims
- 0494US6479409B2Fabrication of a semiconductor device with an interlayer insulating film formed from a plasma devoid of an oxidizing agentCANON SALES CO INC·Filed 2001·Granted Nov 12, 2002·74 cites·20 claims
- 0594US5554570AMethod of forming insulating filmCANON SALES CO INC·Filed 1995·Granted Sep 10, 1996·185 cites·19 claims
- 0692US6514855B1Semiconductor device manufacturing method having a porous insulating filmCANON SALES CO INC·Filed 2000·Granted Feb 4, 2003·77 cites·20 claims
- 0792US5387546AMethod for manufacturing a semiconductor deviceCANON SALES CO INC·Filed 1992·Granted Feb 7, 1995·100 cites·19 claims
- 0889US6372670B1Method and apparatus for forming an interlayer insulating film, and semiconductor deviceCANON SALES CO INC·Filed 2000·Granted Apr 16, 2002·35 cites·8 claims
- 0988US5800877AMethod for forming a fluorine containing silicon oxide filmCANON SALES CO INC·Filed 1996·Granted Sep 1, 1998·96 cites·10 claims
- 1087US6479408B2Semiconductor device and method of manufacturing the sameCANON SALES CO INC·Filed 2001·Granted Nov 12, 2002·38 cites·8 claims
- 1185US6642157B2Film forming method and semiconductor deviceCANON SALES CO INC·Filed 2000·Granted Nov 4, 2003·33 cites·20 claims
- 1283US6413879B1Method for forming an interlayer insulating film, and semiconductor deviceCANON SALES CO INC·Filed 2000·Granted Jul 2, 2002·29 cites·19 claims
- 1382US6852651B2Semiconductor device and method of manufacturing the sameCANON SALES CO INC·Filed 2001·Granted Feb 8, 2005·23 cites·23 claims
- 1482US6524972B1Method for forming an interlayer insulating film, and semiconductor deviceCANON SALES CO INC·Filed 2000·Granted Feb 25, 2003·22 cites·19 claims
- 1580US6645883B2Film forming method, semiconductor device and manufacturing method of the sameCANON SALES CO INC·Filed 2001·Granted Nov 11, 2003·24 cites·14 claims
- 1678US6403410B1Plasma doping system and plasma doping methodCANON SALES CO INC·Filed 1999·Granted Jun 11, 2002·32 cites·12 claims
- 1777US6500752B2Semiconductor device and semiconductor device manufacturing methodCANON SALES CO INC·Filed 2001·Granted Dec 31, 2002·21 cites·17 claims
- 1876US6420276B2Semiconductor device and semiconductor device manufacturing methodCANON SALES CO INC·Filed 2001·Granted Jul 16, 2002·18 cites·16 claims
- 1975US6673725B2Semiconductor device and method of manufacturing the sameCANON SALES CO INC·Filed 2001·Granted Jan 6, 2004·17 cites·11 claims
- 2072US6225236B1Method for reforming undercoating surface and method for production of semiconductor deviceCANON SALES CO INC·Filed 1998·Granted May 1, 2001·43 cites·16 claims
- 2170US6815824B2Semiconductor device and method of manufacturing the sameCANON SALES CO INC·Filed 2002·Granted Nov 9, 2004·10 cites·1 claims
- 2270US6255230B1Method for modifying a film forming surface of a substrate on which a film is to be formed, and method for manufacturing a semiconductor device using the sameCANON SALES CO INC·Filed 1999·Granted Jul 3, 2001·41 cites·13 claims
- 2370US5286681AMethod for manufacturing semiconductor device having a self-planarizing filmCANON SALES CO INC·Filed 1992·Granted Feb 15, 1994·48 cites·6 claims
- 2466US6630412B2Semiconductor device and method of manufacturing the sameCANON SALES CO INC·Filed 2001·Granted Oct 7, 2003·10 cites·18 claims
- 2566US5834730APlasma processing equipment and gas discharging deviceCANON SALES CO INC·Filed 1997·Granted Nov 10, 1998·32 cites·23 claims
- 2665US6780790B2Semiconductor device and method of manufacturing the sameCANON SALES CO INC·Filed 2002·Granted Aug 24, 2004·6 cites·16 claims
- 2761US6750137B1Method and apparatus for forming an interlayer insulating film and semiconductor deviceCANON SALES CO INC·Filed 2000·Granted Jun 15, 2004·7 cites·26 claims
- 2859US6472334B2Film forming method, semiconductor device manufacturing method, and semiconductor deviceCANON SALES CO INC·Filed 2001·Granted Oct 29, 2002·6 cites·15 claims
- 2959US6281113B1Method for forming an interplayer insulating film and semiconductor deviceCANON SALES CO INC·Filed 2000·Granted Aug 28, 2001·6 cites·20 claims
- 3059US6124210AMethod of cleaning surface of substrate and method of manufacturing semiconductor deviceCANON SALES CO INC·Filed 1999·Granted Sep 26, 2000·25 cites·12 claims
- 3157US6835669B2Film forming method, semiconductor device and semiconductor device manufacturing methodCANON SALES CO INC·Filed 2001·Granted Dec 28, 2004·6 cites·7 claims
- 3256US6713383B2Semiconductor device manufacturing methodCANON SALES CO INC·Filed 2002·Granted Mar 30, 2004·5 cites·12 claims
- 3354US6646327B2Semiconductor device and semiconductor device manufacturing methodCANON SALES CO INC·Filed 2002·Granted Nov 11, 2003·4 cites·4 claims
- 3451US6649495B2Manufacturing method of semiconductor deviceCANON SALES CO INC·Filed 2002·Granted Nov 18, 2003·3 cites·11 claims
- 3549US6472330B1Method for forming an interlayer insulating film, and semiconductor deviceCANON SALES CO INC·Filed 2000·Granted Oct 29, 2002·3 cites·9 claims
- 3649US6432839B2Film forming method and manufacturing method of semiconductor deviceCANON SALES CO INC·Filed 2001·Granted Aug 13, 2002·2 cites·15 claims
- 3748US6110814AFilm forming method and semiconductor device manufacturing methodCANON SALES CO INC·Filed 1999·Granted Aug 29, 2000·13 cites·17 claims
- 3846US6435196B1Impurity processing apparatus and method for cleaning impurity processing apparatusCANON SALES CO INC·Filed 1999·Granted Aug 20, 2002·14 cites·5 claims
- 3946US6133162AMethod of forming a film by using plasmanized process gas containing gaseous H2 O and an auxiliary gas in a semiconductor deviceCANON SALES CO INC·Filed 1997·Granted Oct 17, 2000·12 cites·17 claims
- 4046US5952157AMethod for removal of resist film and method for production of semiconductor deviceCANON SALES CO INC·Filed 1997·Granted Sep 14, 1999·9 cites·13 claims
- 4144US5532193AMethod for forming insulating filmCANON SALES CO INC·Filed 1994·Granted Jul 2, 1996·13 cites·12 claims
- 4243US6221755B1Film formation method and manufacturing method of semiconductor deviceCANON SALES CO INC·Filed 1999·Granted Apr 24, 2001·9 cites·10 claims
- 4341US5589001AApparatus for forming a film on a waferCANON SALES CO INC·Filed 1993·Granted Dec 31, 1996·12 cites·8 claims
- 4435US6372650B2Method of cleaning substrate and method of manufacturing semiconductor deviceCANON SALES CO INC·Filed 1998·Granted Apr 16, 2002·4 cites·11 claims
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