Assignee

CARBORUNDUM CORP

US·1 granted patent·23 citations·filing 1996–1996

Technology mixC04B1 H10W1

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1 record

0149US6017485AProcess for making a low electrical resistivity, high purity aluminum nitride electrostatic chuckCARBORUNDUM CORP·Filed 1996·Granted Jan 25, 2000·23 cites·10 claims

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