Assignee
CARDUCCI JAMES D
US·6 granted patents·2 pending applications·381 citations·filing 2008–2012
Top patents by PatentIndex Score
8 records- 0198US9653267B2Temperature controlled chamber linerCARDUCCI JAMES D·Filed 2012·Granted May 16, 2017·319 cites·20 claims
- 0296US8118938B2Lower liner with integrated flow equalizer and improved conductanceCARDUCCI JAMES D·Filed 2011·Granted Feb 21, 2012·26 cites·10 claims
- 0394US8282736B2Lower liner with integrated flow equalizer and improved conductanceCARDUCCI JAMES D·Filed 2012·Granted Oct 9, 2012·14 cites·10 claims
- 0491US8313578B2Etching chamber having flow equalizer and lower linerCARDUCCI JAMES D·Filed 2009·Granted Nov 20, 2012·13 cites·13 claims
- 0589US8440019B2Lower liner with integrated flow equalizer and improved conductanceCARDUCCI JAMES D·Filed 2012·Granted May 14, 2013·7 cites·15 claims
- 0661US8876024B2Heated showerhead assemblyCARDUCCI JAMES D·Filed 2008·Granted Nov 4, 2014·2 cites·11 claims
- 0758US2009188625A1Etching chamber having flow equalizer and lower linerCARDUCCI JAMES D·Filed 2008·Application pending·0 cites
- 0848US2012018402A1Plasma processing apparatus and liner assembly for tuning electrical skewsCARDUCCI JAMES D·Filed 2011·Application pending·0 cites
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