Assignee
CARL ZEISS SMT GMBH
DE·2 granted patents·3 pending applications·0 citations·filing 2023–2025
Top patents by PatentIndex Score
5 records- 0176US2026097989A1Method for producing a mirror substrate of an optical element, optical element and projection exposure apparatusCARL ZEISS SMT GMBH·Filed 2025·Application pending·0 cites
- 0273US2026099098A1Method for manufacturing a projection lens, projection lens, projection exposure system, and projection exposure methodCARL ZEISS SMT GMBH·Filed 2025·Application pending·0 cites
- 0370US2026099100A1Optical subassemblyCARL ZEISS SMT GMBH·Filed 2025·Application pending·0 cites
- 0450US12596307B2Imaging optical unitCARL ZEISS SMT GMBH·Filed 2023·Granted Apr 7, 2026·0 cites·20 claims
- 0549US12596309B2Support for an optical elementCARL ZEISS SMT GMBH·Filed 2024·Granted Apr 7, 2026·0 cites·20 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →