Assignee
CEGLIO NATALE M
US3 patents
Top patents by PatentIndex Score
US8330131B2Dec 11, 2012
Source-collector module with GIC mirror and LPP EUV light source
CEGLIO NATALE M8 citations80
US9057962B2Jun 16, 2015
Source-collector module with GIC mirror and LPP EUV light source
CEGLIO NATALE M3 citations59
US8587768B2Nov 19, 2013
EUV collector system with enhanced EUV radiation collection
CEGLIO NATALE M1 citations49