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CELERITY INC
US37 patents
Top patents by PatentIndex Score
US7073392B2Jul 11, 2006
Methods and apparatus for pressure compensation in a mass flow controller
CELERITY INC93 citations97
US7380564B2Jun 3, 2008
System and method for a mass flow controller
CELERITY INC34 citations96
US7273063B2Sep 25, 2007
Methods and apparatus for pressure compensation in a mass flow controller
CELERITY INC36 citations95
US7360448B2Apr 22, 2008
Ultrasonic flow sensor having reflecting interface
CELERITY INC57 citations94
US7434477B2Oct 14, 2008
Methods and apparatus for pressure compensation in a mass flow controller
CELERITY INC29 citations92
US7424894B2Sep 16, 2008
Method and apparatus for providing a determined ratio of process fluids
CELERITY INC17 citations92
US7360551B2Apr 22, 2008
Method and apparatus for providing a determined ratio of process fluids
CELERITY INC27 citations92
US7272512B2Sep 18, 2007
Flow sensor signal conversion
CELERITY INC30 citations92
US7231931B2Jun 19, 2007
System and method for a mass flow controller
CELERITY INC25 citations92
US7225835B2Jun 5, 2007
Modular substrate gas panel having manifold connections in a common plane
CELERITY INC23 citations92
US7143774B2Dec 5, 2006
Method and apparatus for providing a determined ratio of process fluids
CELERITY INC18 citations92
US7043374B2May 9, 2006
Flow sensor signal conversion
CELERITY INC19 citations92
US6941965B2Sep 13, 2005
Method and apparatus for providing a determined ratio of process fluids
CELERITY INC23 citations92
US6923568B2Aug 2, 2005
Method and apparatus for blending process materials
CELERITY INC98 citations92
US7216019B2May 8, 2007
Method and system for a mass flow controller with reduced pressure sensitivity
CELERITY INC49 citations91
US7133785B2Nov 7, 2006
Valve control system and method
CELERITY INC31 citations90
US7424895B2Sep 16, 2008
Method and system for flow measurement and validation of a mass flow controller
CELERITY INC16 citations89
US7412986B2Aug 19, 2008
Method and system for flow measurement and validation of a mass flow controller
CELERITY INC25 citations89
US7117104B2Oct 3, 2006
Ultrasonic liquid flow controller
CELERITY INC42 citations88
US7307247B2Dec 11, 2007
Surface mount heater
CELERITY INC18 citations86
US7126094B2Oct 24, 2006
Surface mount heater
CELERITY INC28 citations86
US7334605B2Feb 26, 2008
Modular substrate gas panel having manifold connections in a common plane
CELERITY INC33 citations85
US7409871B2Aug 12, 2008
Mass flow meter or controller with inclination sensor
CELERITY INC16 citations84
US7344298B2Mar 18, 2008
Method and apparatus for blending process materials
CELERITY INC34 citations83
US7131334B2Nov 7, 2006
Pressure sensor device and method
CELERITY INC18 citations82
US7222029B2May 22, 2007
Attitude insensitive flow device system and method
CELERITY INC10 citations81
US7150201B2Dec 19, 2006
System and method for measuring flow
CELERITY INC14 citations81
US7395716B2Jul 8, 2008
Variable capacitance measuring device
CELERITY INC4 citations72
US7113895B2Sep 26, 2006
System and method for filtering output in mass flow controllers and mass flow meters
CELERITY INC6 citations72
US7073388B2Jul 11, 2006
Variable capacitance measuring device comprising a glass-ceramic insulator
CELERITY INC7 citations72
US7490518B2Feb 17, 2009
System and method of operation of an embedded system for a digital capacitance diaphragm gauge
CELERITY INC6 citations71
US7287434B2Oct 30, 2007
System and method for measuring flow
CELERITY INC7 citations71
US7243035B2Jul 10, 2007
System and method for mass flow detection device calibration
CELERITY INC9 citations71
US7082824B2Aug 1, 2006
Variable resistance sensor with common reference leg
CELERITY INC5 citations62
US7412336B2Aug 12, 2008
Attitude insensitive flow device system and method
CELERITY INC3 citations60
US7363182B2Apr 22, 2008
System and method for mass flow detection device calibration
CELERITY INC5 citations60
US7124647B2Oct 24, 2006
Slotted flow restrictor for a mass flow meter
CELERITY INC2 citations55