Assignee
CENSOR PATENT VERSUCH
LI·15 granted patents·998 citations·filing 1978–1982
Top patents by PatentIndex Score
15 records- 0197US4390273AProjection mask as well as a method and apparatus for the embedding thereof and projection printing systemCENSOR PATENT VERSUCH·Filed 1981·Granted Jun 28, 1983·722 cites·17 claims
- 0289US4355892AMethod for the projection printingCENSOR PATENT VERSUCH·Filed 1980·Granted Oct 26, 1982·58 cites·5 claims
- 0384US4432635ATemperature-controlled support for semiconductor waferCENSOR PATENT VERSUCH·Filed 1982·Granted Feb 21, 1984·48 cites·7 claims
- 0480US4362385AProcess and arrangement for copying masks on a workpiece with arrangement for correction of alignment errorsCENSOR PATENT VERSUCH·Filed 1980·Granted Dec 7, 1982·33 cites·10 claims
- 0576US4269505ADevice for the projection printing of the masks of a mask set onto a semiconductor substrateCENSOR PATENT VERSUCH·Filed 1979·Granted May 26, 1981·23 cites·14 claims
- 0668US4270649AMethod for controlling operating processesCENSOR PATENT VERSUCH·Filed 1978·Granted Jun 2, 1981·15 cites·1 claims
- 0760US4357100AArrangement for projection copying masks on to a work pieceCENSOR PATENT VERSUCH·Filed 1980·Granted Nov 2, 1982·16 cites·3 claims
- 0854US4496241AProcess and device for relatively aligning the image and object surfaces in optical copying systemsCENSOR PATENT VERSUCH·Filed 1980·Granted Jan 29, 1985·12 cites·8 claims
- 0954US4376581AMethod of positioning disk-shaped workpieces, preferably semiconductor wafersCENSOR PATENT VERSUCH·Filed 1980·Granted Mar 15, 1983·15 cites·5 claims
- 1052US4473292ADampening systemCENSOR PATENT VERSUCH·Filed 1982·Granted Sep 25, 1984·11 cites·10 claims
- 1148US4449650AMetering pump especially for volatile materialsCENSOR PATENT VERSUCH·Filed 1981·Granted May 22, 1984·10 cites·3 claims
- 1248US4405229AMethod of projecting printing on semiconductor substrate and workpiece including such substrateCENSOR PATENT VERSUCH·Filed 1981·Granted Sep 20, 1983·9 cites·7 claims
- 1346US4461567AMethod of and apparatus for the positioning of disk-shaped workpieces, particularly semiconductor wafersCENSOR PATENT VERSUCH·Filed 1982·Granted Jul 24, 1984·13 cites·6 claims
- 1440US4236701ADevice for fixing a planar work pieceCENSOR PATENT VERSUCH·Filed 1978·Granted Dec 2, 1980·6 cites·2 claims
- 1535US4379831AProcess for transferring a pattern onto a semiconductor diskCENSOR PATENT VERSUCH·Filed 1980·Granted Apr 12, 1983·7 cites·6 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →