Assignee
CHAN LANA HIULUI
US·2 granted patents·92 citations·filing 2010–2011
Top patents by PatentIndex Score
2 records- 0197US8409985B2Methods for growing low-resistivity tungsten for high aspect ratio and small featuresCHAN LANA HIULUI·Filed 2011·Granted Apr 2, 2013·59 cites·21 claims
- 0295US8329576B2Method for improving uniformity and adhesion of low resistivity tungsten filmCHAN LANA HIULUI·Filed 2010·Granted Dec 11, 2012·33 cites·21 claims
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