Assignee
CHANDRACHOOD MADHAVI R
US·2 granted patents·1 pending application·37 citations·filing 2006–2010
Top patents by PatentIndex Score
3 records- 0192US8202441B2Process for etching a metal layer suitable for use in photomask fabricationCHANDRACHOOD MADHAVI R·Filed 2010·Granted Jun 19, 2012·22 cites·17 claims
- 0289US9218944B2Mask etch plasma reactor having an array of optical sensors viewing the workpiece backside and a tunable element controlled in response to the optical sensorsCHANDRACHOOD MADHAVI R·Filed 2006·Granted Dec 22, 2015·15 cites·12 claims
- 0343US2008179282A1Mask etch processCHANDRACHOOD MADHAVI R·Filed 2007·Application pending·0 cites
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